44N High-Precision Cylindrical Voice Coil Motors For Semiconductor Equipment

Product Overview

The VCAR0044-0075-00A is a cylindrical voice coil motor specifically designed to achieve high positioning accuracy. Powered by a 16.8V DC power supply, this voice coil motor provides direct linear motion with a peak thrust of 44N over a 7.5mm stroke and achieves a positioning resolution of 0.5um when used in closed-loop control with a linear encoder.
The non-contact moving-coil design eliminates backlash, cogging, and hysteresis, enabling the motor to hold its position and repeatedly return to the same location. The short, rigid motion path and low moving mass provide the system with high mechanical bandwidth, helping the servo loop suppress disturbances and stabilize quickly.
This voice-coil motor is manufactured using precision-ground components and a balanced magnetic circuit to maintain low force ripple. The precision-ground guide rail surfaces and matched magnets keep force ripple below 1% of the rated output value throughout the entire stroke. It is an ideal component for micrometer-level alignment, inspection, or measurement equipment.

Solution

Positioning errors in precision equipment typically stem from backlash, stick-slip friction, thermal drift, and mechanical resonance. Voice-coil motors completely eliminate the first two sources of error: there are no gears or lead screws to cause backlash, and the non-contact coil design means there is no static friction to overcome. The remaining errors are controlled through a closed-loop system that incorporates a high-resolution linear encoder, which provides direct feedback on the load’s actual position.
Since force is proportional to current, the servo system can precisely apply exactly the right amount of force to achieve 0.5-micrometer step movements or maintain a stable position under load. The result is a motion axis with micrometer-level precision, free from wear-induced drift, and consistent performance over millions of cycles.
Because there is no friction, stick-slip effects—a common cause of jitter in traditional stages—do not occur even at extremely low speeds. For alignment, inspection, and machining applications, this solution increases throughput while reducing scrap and rework.

Specifications

Application

Typical Applications: These include semiconductor wafer alignment, photonics and fiber alignment, laser processing head positioning, Z-axis focusing in microscopes, precision measurement platforms, mask inspection, and medical device positioning.
This voice coil actuator is also used in autofocus systems for industrial cameras and for precision valve control in analytical instruments. Any short-stroke motion task requiring submicron resolution and stable position holding capabilities can benefit from this actuator.

FAQ

Q: How is 0.5um resolution achieved?
A: The resolution comes from the combination of a friction-free voice coil motor and a high-resolution linear encoder in a closed servo loop. The encoder measures true load position, and the motor's smooth force output allows single-step moves of 0.5um.

Q: What factors affect repeatability?
A: Repeatability depends mainly on encoder quality, servo tuning and thermal stability. The contactless design removes friction and wear, so mechanical repeatability stays consistent over the life of the motor. Regular encoder calibration is the only routine maintenance recommended.

Q: Can the motor hold position when powered?
A: Yes. In a closed loop, the servo can hold the coil at any position within the stroke by balancing the force against the load. A holding brake is not required for most static applications.

Q: Can I get a customized stroke or encoder option?
A: Yes. SUPT MOTION can adjust stroke, force, voltage and encoder type. Contact us with your accuracy target and motion profile for a tailored proposal.