High Speed Brushless Small Linear Servo Motor Precision Motion Stages For Semiconductor Equipment

Vcm Voice Coil Motor
October 29, 2025
Category Connection: Linear Servo Motor
Brief: Discover the High Speed Brushless Small Linear Servo Motor, designed for precision motion stages in semiconductor equipment. This Permanent Magnet Linear Motor ensures high-speed, smooth motion with direct drive technology, eliminating mechanical play and backlash. Ideal for semiconductor manufacturing, flat panel display testing, and medical equipment.
Related Product Features:
  • Direct drive system eliminates mechanical play, backlash, and friction for smoother motion.
  • Minimized cogging effect ensures consistent and smooth movement.
  • Precise positioning control for accurate movement without overshooting.
  • High acceleration and deceleration capabilities for rapid speed transitions.
  • Smooth force generation reduces jerk and vibration during operation.
  • Low rotor inertia enables quick changes in motion direction and speed.
  • Closed-loop control with real-time feedback for precise trajectory correction.
  • Linear servo control maintains intended path without deviations.
Faqs:
  • What industries benefit from this linear servo motor?
    This motor is ideal for semiconductor manufacturing equipment, flat panel display testing, medical equipment, and logistics systems.
  • How does the motor achieve smooth motion?
    The direct drive design eliminates mechanical components like gears, reducing friction and backlash, while minimized cogging ensures consistent movement.
  • What are the key performance parameters of this motor?
    Key parameters include peak force (60-240 N), continuous force (20-80 N), and rapid acceleration due to low inertia and closed-loop control.