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High-Precision Rotary Voice Coil Motor For Semiconductor Wafer Inspection Equipment
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xProduct Details
| Weight | 65g | Length | 81mm |
|---|---|---|---|
| Voltage | 8.4V | Product Model | VARS0120-020-00A |
| Peak Force | 1.2N-m | Total Stroke | 20° |
| Type | Micro Motor | Housing Material | Aluminum |
| Motion Type | Rotary |
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| Model | Price | |
|---|---|---|
| VARS0022-0032-00B | $210 | |
| VARS0048-0030-00A | $175 | |
| VARS0706-0014-00A | $150 |
Product Description
Product Description:
High-precision vacuum radiation-resistant rotary voice coil motor, specifically designed for the harsh environment of semiconductor wafer inspection, can operate stably under a vacuum of 10⁻⁶ Pa and strong radiation. The motor uses special radiation-resistant insulation materials, with windings free of organic volatiles to avoid contaminating the wafer surface. It supports continuous rotation at multiple angles and precise angle positioning, used for driving inspection probes to adjust orientation. The non-contact rotation structure ensures no wear and no particle generation, meeting the cleanroom requirements of the semiconductor industry. Torque output is smooth, positioning accuracy reaches ±0.08°, and response speed is fast, making it suitable for wafer defect inspection, dimensional measurement, and other equipment to improve inspection efficiency and data accuracy, supporting the automation upgrade of semiconductor production lines.
Features:
- Product Name: Rotary Voice Coil Motor
- Weight: 65g
- Size: 81*73.4*32mm
- Name: Rotary Voice Coil Motor
- Stroke: 20°
- Life: 10000h
- Vacuum level: 10⁻⁶ Pa
- Radiation tolerance: ≥10⁵ Gy
- Positioning accuracy: ±0.08°
- Torque range: 1.2 N·m
- Rotation speed: 100-800 r/min
- Protection rating: IP67 (vacuum sealed)
- Special Feature: Curved Voice Coil Motor, Rotating VCM, Rotary Voice Coil Motor
Technical Parameters:
| Parameters | Details |
|---|---|
| Type | Rotary Voice Coil Motor (Rotary VCM, Rotary voice coil Actuator) |
| Warranty | 1 Year |
| Stroke | 20° |
| Peak torque | 1.2N-m |
| Noise | Low |
| Size | 81*73.4*32mm |
| Length | 81mm |
| Speed | High |
| Weight | 65g |
| Voltage | 8.4V |
| Product Model | Peak torque (N-m) |
Continuos torque at 25℃(N-m) |
Total Stroke degrees ( degree) |
Max Voltage (V) |
Back EMF Constant (V/m/s) |
Weight of the coil(g) | Length (mm) |
Width (mm) |
Height (mm) |
| VARS0008-026-00A | 0.08 | 0.05 | 26 | 6.4 | 0.05 | 11.7 | 35 | 39.8 | 36.1 |
| VARS0017-090-00A | 0.17 | 0.1 | 90 | 11.1 | 0.1 | 17.8 | 70 | 41.5 | 39 |
| VARS0022-032-00A | 0.22 | 0.12 | 32 | 15.5 | 0.16 | 21.5 | 60 | 60 | 36 |
| VARS0042-040-00A | 0.42 | 0.38 | 40 | 3.5 | 0.12 | 38 | 82 | 53.6 | 30.3 |
| VARS0077-020-00A | 0.77 | 0.63 | 20 | 6.7 | 0.24 | 66 | 75 | 50 | 30 |
| VARS0084-030-00A | 0.84 | 0.6 | 30 | 6.3 | 0.2 | 50.4 | 75 | 48.9 | 30.6 |
| VARS0120-020-00A | 1.2 | 0.5 | 20 | 8.4 | 0.67 | 65 | 81 | 73.4 | 32 |
| VARS0350-060-00A | 3.5 | 1.6 | 60 | 26.3 | 0.4 | 350 | ∮169.6 | ∮169.6 | 63 |
| VARS0706-014-00A | 7.1 | 2.1 | 14 | 52.4 | 1.03 | 225.5 | 115 | 65 | 54.5 |
| VARS4520-030-00A | 45.2 | 19 | 30 | 71.5 | 4.3 | 1350 | ∮240 | 78 |
Applications:
In wafer defect inspection and chip packaging processes, rotary voice coil motors, with angular positioning accuracy within ±0.1°, drive inspection probes to perform high-frequency, small-amplitude rotational scans across the wafer surface. Its design without mechanical transmission structures eliminates backlash errors, and combined with millisecond-level response speed, it can precisely capture the fine details of chip circuitry, achieving nanometer-level defect detection and providing core support for yield control in semiconductor manufacturing.
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