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High Precision Micro Rotary Voice Coil Motor For Wafer Inspection And Measurement
| Place of Origin | China,Suzhou |
|---|---|
| Brand Name | SUPT MOTION |
| Certification | CE, ISO9001 |
| Model Number | VARS0042-040-00A |
| Minimum Order Quantity | 1PCS |
| Price | $112-$190 |
| Packaging Details | Customized packaging etc. |
| Delivery Time | 1-5pcs ,5 days . >20pcs ,To be negotiated |
| Payment Terms | T/T |
| Supply Ability | To be negotiated |
Product Details
| Protect Feature | Totally Enclosed | Application | Automatic Product |
|---|---|---|---|
| Voltage | 3.5V | Peak Thrust | 0.42N-m |
| Size | 82*53.6*30.3mm | Stroke | 40° |
| Material | Aluminum Alloy | Actuation Method | Voice Coil |
| Warranty | 3months-1year | Rated Speed | 100RPM |
| Back EMF Constant(L-L)(Kb) | 0.12 | Weight Of The Coil(g) | 38 |
| Highlight | high precision rotary voice coil motor,micro voice coil motor for wafer inspection,rotary voice coil motor with warranty |
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Product Description
Product Description:
In wafer inspection and metrology equipment, the rotary voice coil motor is the core driving component for achieving precise scanning inspection. Leveraging its high bandwidth and high-precision direct-drive characteristics, it can drive inspection probes or optical lenses to perform high-frequency, small-angle rotational scans around the wafer surface. Coupled with algorithm optimization from specialized motion controllers, this enables nanometer-level defect identification and accurate measurement. The rotary voice coil motor's design without mechanical transmission eliminates backlash errors, effectively suppresses vibration interference, and ensures the precise capture of nanoscale defects during wafer defect inspection and circuit pattern scanning. It also meets the rotational movement requirements of three-degree-of-freedom wafer adjustment platforms, enabling fine angular adjustments along the θx/θy axes, providing reliable support for yield control in semiconductor manufacturing processes.
Features:
Light weight of actuator coil, short response time and high frequency.
Product types: rotary voice coil motors, oscillating voice coil motors, arc-shaped voice coil motors.
Positioning accuracy: ±0.08°
Torque range: 0.42 N·m
Rotational speed: 100-800 r/min
Product Parameters:
| Product Model | Peak torque (N-m) |
Continuos torque at 25℃(N-m) |
Total Stroke (degree) |
Max Voltage (V) |
Back EMF Constant (V/m/s) |
Weight of the coil(g) | Length (mm) |
Width (mm) |
Height (mm) |
| VARS0008-026-00A | 0.08 | 0.05 | 26 | 6.4 | 0.05 | 11.7 | 35 | 39.8 | 36.1 |
| VARS0017-090-00A | 0.17 | 0.1 | 90 | 11.1 | 0.1 | 17.8 | 70 | 41.5 | 39 |
| VARS0022-032-00A | 0.22 | 0.12 | 32 | 15.5 | 0.16 | 21.5 | 60 | 60 | 36 |
| VARS0042-040-00A | 0.42 | 0.38 | 40 | 3.5 | 0.12 | 38 | 82 | 53.6 | 30.3 |
| VARS0077-020-00A | 0.77 | 0.63 | 20 | 6.7 | 0.24 | 66 | 75 | 50 | 30 |
| VARS0084-030-00A | 0.84 | 0.6 | 30 | 6.3 | 0.2 | 50.4 | 75 | 48.9 | 30.6 |
| VARS0120-020-00A | 1.2 | 0.5 | 20 | 8.4 | 0.67 | 65 | 81 | 73.4 | 32 |
| VARS0350-060-00A | 3.5 | 1.6 | 60 | 26.3 | 0.4 | 350 | ∮169.6 | ∮169.6 | 63 |
| VARS0706-014-00A | 7.1 | 2.1 | 14 | 52.4 | 1.03 | 225.5 | 115 | 65 | 54.5 |
| VARS4520-030-00A | 45.2 | 19 | 30 | 71.5 | 4.3 | 1350 | ∮240 | 78 |
Application:
| The main application of a voice coil motor: |
| 1.Semiconductor industry:Wiring, cutting, drilling, transportation systems, welding,robotics. |
|
2.Valve operation in the field:Type metering valves, pressure test systems, pneumatic valve chemistry injection system. |
| 3.Micro Machine industry:Feed systems, micro drilling, precision stamping. |
| 4.Vibration System:Shaking table, vibration platform. |
| 5.Medical field:Micro-injection system, respiratory equipment, testing equipment. |
| 6.Aviation Technology:Flight control system, pilot feedback system. |
| 7.Commercial use field:Computer cooling pump miniature camera auto focus system. |
| 8.Automation industry:Laser equipment,dispenser, test equipment, textile machinery. |
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