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High Precision Micro Rotary Voice Coil Motor Used For Wafer Alignment
Product Details
| Weight | 21.5g | Length | 60mm |
|---|---|---|---|
| Voltage | 15.5V | Product Model | VARS0022-032-00A |
| Protect Feature | Totally Enclosed | Back EMF Constant(L-L)(Kb) | 0.16 |
| Length*Height(mm) | 60*36 | Maximum Travel(mm) | 32° |
| Type | Micro Motor | Rated Speed | 100RPM |
| Highlight | high precision rotary voice coil motor,micro rotary voice coil motor,wafer alignment voice coil motor |
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| Model | Price | |
|---|---|---|
| VARS0022-0032-00B | $105 | |
| VARS0048-0030-00A | $230 | |
| VARS0706-0014-00A | $115 |
Product Description
Product Description:
As a high-precision direct-drive power component, the rotary voice coil motor plays a key role in wafer angle calibration during the wafer alignment and positioning process, thanks to its core advantages of ±0.01° rotational repeatability, millisecond-level response speed, cog-free operation, and low wear. In pre-processing steps such as semiconductor lithography and etching, wafer angular deviations directly affect the accuracy of subsequent processes. The rotary voice coil motor can rapidly drive the wafer stage to perform fine-angle rotational adjustments based on feedback from the vision positioning system, with a response time of less than 10ms, ensuring precise alignment of the wafer with the lithography mask and etching path. It offers repeatability accuracy within ±0.1°, perfectly meeting the high-precision alignment requirements for ultra-thin and irregular-shaped wafers. Additionally, its compact structural design allows integration into limited device spaces and fits the integrated design requirements of the wafer adjustment platform.
Features:
- Product Name: Rotary Voice Coil Motor,Rotary Direct Drive VCM,Swing Voice Coil Motor,Arc Voice Coil Motor
- Weight: 21.5g
- Model Number:VARS0022-032-00A
- Name: Rotary Voice Coil Motor
- Stroke: 32°
Technical Parameters:
| Parameters | Details |
|---|---|
| Type | Rotary Voice Coil Motor (Rotary VCM, Rotary voice coil Actuator) |
| Warranty | 1 Year |
| Stroke | 32° |
| Peak torque | 0.22 N-m |
| Noise | Low |
| Length | 60mm |
| Speed | High |
| Weight | 21.5g |
| Voltage | 15.5V |
| Product Model | Peak torque (N-m) |
Continuos torque at 25℃(N-m) |
Total Stroke degrees ( degree) |
Max Voltage (V) |
Back EMF Constant (V/m/s) |
Weight of the coil(g) | Length (mm) |
Width (mm) |
Height (mm) |
| VARS0008-026-00A | 0.08 | 0.05 | 26 | 6.4 | 0.05 | 11.7 | 35 | 39.8 | 36.1 |
| VARS0017-090-00A | 0.17 | 0.1 | 90 | 11.1 | 0.1 | 17.8 | 70 | 41.5 | 39 |
| VARS0022-032-00A | 0.22 | 0.12 | 32 | 15.5 | 0.16 | 21.5 | 60 | 60 | 36 |
| VARS0042-040-00A | 0.42 | 0.38 | 40 | 3.5 | 0.12 | 38 | 82 | 53.6 | 30.3 |
| VARS0077-020-00A | 0.77 | 0.63 | 20 | 6.7 | 0.24 | 66 | 75 | 50 | 30 |
| VARS0084-030-00A | 0.84 | 0.6 | 30 | 6.3 | 0.2 | 50.4 | 75 | 48.9 | 30.6 |
| VARS0120-020-00A | 1.2 | 0.5 | 20 | 8.4 | 0.67 | 65 | 81 | 73.4 | 32 |
| VARS0350-060-00A | 3.5 | 1.6 | 60 | 26.3 | 0.4 | 350 | ∮169.6 | ∮169.6 | 63 |
| VARS0706-014-00A | 7.1 | 2.1 | 14 | 52.4 | 1.03 | 225.5 | 115 | 65 | 54.5 |
| VARS4520-030-00A | 45.2 | 19 | 30 | 71.5 | 4.3 | 1350 | ∮240 | 78 |
Applications:
The main application of a voice coil motor:
1.Semiconductor industry:Wiring, cutting, drilling, transportation systems, welding,robotics.
2.Valve operation in the field:Type metering valves, pressure test systems, pneumatic valve chemistry
injection system.
3.Micro Machine industry:Feed systems, micro drilling, precision stamping.
4.Vibration System:Shaking table, vibration platform.
5.Medical field:Micro-injection system, respiratory equipment, testing equipment.
6.Aviation Technology:Flight control system, pilot feedback system.
7.Commercial use field:Computer cooling pump miniature camera auto focus system.
8.Automation industry:Laser equipment,dispenser, test equipment, textile machinery.
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