High Frequency Micro Resonant Rotary Voice Coil Motor Used For Chip Packaging

As a high-precision direct-drive power component, the rotary voice coil motor plays a key role in wafer angle calibration during the wafer alignment and positioning process, thanks to its core advantages of ±0.01° rotational repeatability, millisecond-level response speed, cog-free operation, and low wear. In pre-processing steps such as semiconductor lithography and etching, wafer angular deviations directly affect the accuracy of subsequent processes. The rotary voice coil motor can rapidly drive the wafer stage to perform fine-angle rotational adjustments based on feedback from the vision positioning system, with a response time of less than 10ms, ensuring precise alignment of the wafer with the lithography mask and etching path. It offers repeatability accuracy within ±0.1°, perfectly meeting the high-precision alignment requirements for ultra-thin and irregular-shaped wafers. Additionally, its compact structural design allows integration into limited device spaces and fits the integrated design requirements of the wafer adjustment platform.